Lithography

* Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents * A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.

This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

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