{"product_id":"9781510692534-extreme-ultraviolet-lithography","title":"Extreme Ultraviolet Lithography","description":"\u003cmeta content=\"text\/html; charset=utf-8\" http-equiv=\"Content-Type\"\u003e\u003cp\u003e\u003cspan\u003eDiscover refined techniques in EUV lithography with updates detailing exposure tools, light sources, masks, resists, metrology, and computational lithography. Addressing cost and process control, the work offers practical insights from a seasoned lithographer operating in manufacturing and development.\u003cbr\u003eIn this second edition of \u003ci\u003eExtreme Ultraviolet Lithography\u003c\/i\u003e, coverage is maintained on the fundamental aspects of EUV lithographic technology for topics such as exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Lithography costs, which have often influenced areas of technical focus, are also discussed. Many updates are included that reflect the significant advances in EUV lithography since the publication of the first edition. All topics are approached from the perspective of a practicing lithographer in a wafer fab, working in either manufacturing or development, and there are many references at the end of each chapter.\u003cbr\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e","brand":"Rarewaves","offers":[{"title":"Default Title","offer_id":57484183208310,"sku":"9781510692534","price":59.49,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0092\/7504\/8033\/files\/stand_40391715.jpg?v=1773897266","url":"https:\/\/www.rarewaves.com\/products\/9781510692534-extreme-ultraviolet-lithography","provider":"Rarewaves.com","version":"1.0","type":"link"}