{"product_id":"9780124693708-plasma-etching-an-introduction","title":"Plasma Etching","description":"\u003cmeta content=\"text\/html; charset=utf-8\" http-equiv=\"Content-Type\"\u003e\u003cp\u003e\u003cspan\u003eAn Introduction\u003cbr\u003ePlasma etching plays an essential role in microelectronic circuit manufacturing. Useful for researchers, process engineers, and students, this book introduces the physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. It offers practical examples of process chemistry, equipment design, and production methods.\u003cbr\u003ePlasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.\u003cbr\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e","brand":"Rarewaves","offers":[{"title":"Default Title","offer_id":55211149820278,"sku":"9780124693708","price":88.66,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0092\/7504\/8033\/files\/orig_27868880.jpg?v=1738245004","url":"https:\/\/www.rarewaves.com\/products\/9780124693708-plasma-etching-an-introduction","provider":"Rarewaves.com","version":"1.0","type":"link"}